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YBa2Cu3O7-δ thin films deposited by a vertical MOCVD reactor
Sujiono E.H.a, Arifin P.a, Barmawi M.a
a Laboratory of Electronic Material Physics (LEMP), Department of Physics, Bandung Institute of Technology, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]Thin films of YBCO have been grown by a home-built-MOCVD vertical reactor. The growth temperature were varied between 600 and 750°C and the growth rates were 0.4-0.5 μm/h. At the substrate temperature between 630 and 675°C, the films consist of a mixture of a-axis and c-axis oriented grains, while at temperature of 700°C or higher, the a-axis oriented grain changed to random orientation. The stoichiometric composition of Y:Ba:Cu for films grown at 680°C or higher is almost 1:2:3, as confirmed by electron dispersive X-rays (EDAX) spectra. Films deposited at 680 and 700°C show superconducting critical temperature around 87 and 87.4K, respectively. Films properties are comparable with film grown using horizontal MOCVD reactor reported by previous reports. © 2002 Elsevier Science B.V. All rights reserved.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Vertical reactors[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]MOCVD,Superconductor,Thin films,Vertical reactor,YBCO[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text]This work was supported by Center Grant URGE Project, DGHE, The Ministry of Education and Culture, The Republic of Indonesia, under contract no.: 008/CG/III/URGE/1997. One of the authors (E.H.S.) would like to thank The Habibie Center for a scholarship.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1016/S0254-0584(01)00351-0[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]