[vc_empty_space][vc_empty_space]
YBa2Cu3O7-δ Thin Films Deposited by MOCVD Vertical Reactor with a Flow Guide
Sujiono E.H.a,b, Sani R.A.a, Saragi T.a, Arifin P.a, Barmawi M.a
a Lab. of Electronic Material Physics, Department of Physics, Bandung Institute of Technology, Indonesia
b Department of Physics, Universitas Negeri Makassar, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]The effect of a flow guide in a vertical MOCVD reactor on the deposition uniformity and growth rate of thin YBCO films has been studied. Without the flow guide the growth rates are low, have a poor uniformity and the film composition is not stoichiometric. The growth rate of the films grown using a reactor with the flow guide was approximately twice that without the flow guide. Using this flow guide the growth rates were 0.4-0.7 μm/h for growth temperatures varying between 600 and 750°C, and the crystalline quality as well as the surface morphology of YBCO films on MgO substrates is improved. For films grown at temperatures above 650°C the composition of Y:Ba:Cu is 1:2:3, as confirmed by EDAX spectra. Films deposited without and with the flow guide at 700°C have critical temperatures around 85 and 88 K, respectively. The reduction in ΔTc (Tc,zero-Tc,onset) also shows an improvement of the superconducting properties of YBCO thin films deposited with a flow guide.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]<a href="https://doi.org/10.1002/1521-396X(200110)187:23.0.CO;2-M”>https://doi.org/10.1002/1521-396X(200110)187:23.0.CO;2-M[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]<a class="plumx-summary plum-liberty-theme" href="https://plu.mx/plum/a/?doi=10.1002/1521-396X(200110)187:23.0.CO;2-M” data-site=”plum” data-hide-when-empty=”true” data-pass-hidden-categories=”true”>Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]