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Simple method for synthesizing Pt nano-droplets as metal catalyst in siNW deposition
Setiawan A.a,b, Latununuwe A.b,c, Sustini E.b, Winata T.b
a Department of Physics, Indonesia University of Education (UPI), Indonesia
b Physics of Electronic Material Research Division, Bandung Institute of Technology (ITB), Indonesia
c Department of Physics, Pattimura University (UNPATTI), Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]Silicon nanowire (SiNW) deposition can be performed by introducing Si precursor onto metal catalyzed substrate as a lead on vapor-liquid-solid (VLS) mechanism. Nanosize metallic droplet as catalyst can be synthesized by annealing a very thin metallic film in order to break it into droplet. The simple method had been used for synthesizing Platinum (Pt) nano-droplet. A very thin Pt film had been grown on a wafer silicon substrate using fine coat ion sputtering followed by annealing in which the temperature varied in the interval of 700-800°C, each for 30 minutes. The surface morphology of the film was done by scanning electron microscope (SEM) which showed that Pt nano-droplet in the best formation obtained at the annealing temperature of 800°C. In addition, dependences of the film thickness and annealing time to produce Pt nano-droplet formation, especially the nano-droplet size, had been investigated. © 2010 American Institute of Physics.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]annealing temperature,annealing time,film thickness,Pt nano-droplet,surface morphology[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1063/1.3515548[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]