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Silicon nanowire (SiNW) growth using Vapor Liquid Solid method with gold nanoparticle (Au-np) catalyst
Surawijaya A.a, Anshori I.a, Rohiman A.a, Idris I.a
a School of Electrical Engineering and Informatics, Bandung Institute of Technology, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]Silicon Nanowire (Si-NW) is one of the promising nanodevices which attract many attentions due to its potential applications in many fields. We used Vapor-Liquid-Solid (VLS) method to grow SiNW on silicon with gold nanoparticles (Au-np) as catalyst. SiNWs are grown in CVD reactor with Vapor-Liquid-Solid method. SiNWs with diameter 20-40 nm and lenght ∼500-800 nm has been successfully grown. As a preliminary analysis on its electrical behaviour we used online simulator for nanowires to predict its I-V characteristics. © 2011 IEEE.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]CVD reactors,Gold Nanoparticles,IV characteristics,Nano-devices,Potential applications,Preliminary analysis,Silicon Nanowire,Silicon nanowires,Vapor liquid solid methods,Vapor-liquid-solid[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Gold Nanoparticle,Silicon Nanowire,Vapor-Liquid-Solid[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1109/ICEEI.2011.6021750[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]