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Al-doped ZnO thin films for ethanol sensors
Nulhakim L.a, Nugrahaa, Nuruddin A.a, Suyatmana, Yuliarto B.a
a Materials Processing Laboratory, Department of Engineering Physics, Institut Teknologi Bandung (ITB), Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]Al doped ZnO (AZO) is done to understand the effect of Al dopant on ZnO. The sensor response condition will be analyzed for ethanol detection. Chemical Bath Deposition (CBD) method is used to fabrication pure ZnO and AZO thin films. Al dopant concentrations used in this study is 2.9 at% Al. The crystallinity, composition and morphology were investigated by using XRD, EDS and SEM. The ZnO and AZO gas sensors were exposed to different concentrations of ethanol at room temperature, 2.5%, 5% and 7.5% volume ethanol, respectively. The sensor response at low concentrations (2.5% V) for pure ZnO sample is 70.88% and 88.57% for high concentrations of ethanol (7.5% V). The highest sensor response for AZO sample is 95.29% at low concentrations (2.5% V) and 96.68% V at the high concentration (7.5% V). © 2011 American Institute of Physics.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Al doped ZnO (AZO),Chemical Bath Deposition (CBD),ethanol[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1063/1.3667262[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]