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Theoretical study of atomic level understanding of the reactive ion etching (RIE)
Muhida R.a, Rahman M.M.b, Chowdhury M.S.H.c, Setiyanto H.d, Zainuddin H.a,b, Zakaria A.B.a,b, Kasai H.e
a Department of Physics, Surya College of Education (STKIP Surya), Gedung SURE, Indonesia
b Faculty of Science, Department of Physics, Universiti Putra Malaysia, Malaysia
c Department of Science in Engineering, International Islamic University Malaysia, Malaysia
d Analytical Chemistry Research Group, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Indonesia
e Department of Precision Science and Technology and Applied Physics, Osaka University, Japan
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]We consider cluster model of FeNi4 cluster (as material target) where Fe ion is surrounded by four Ni ions, in order to understand the mechanisms involved in the reactive ion etching (RIE) processes on magnetic surfaces (e.g., FeNi surface). By considering CO ions as reactive gases, we etch Fe ion from the cluster surface producing iron pentacarbonyl, i.e., Fe(CO)5. By density functional theory based first principle calculations, we calculate the potential energy surface (PES) of the system and describe the mechanism of this reaction. Based on the two chosen pathways for initial and final states, we show that the RIE processes follow the pathway that gives us minimum energy. Copyright © 2012 American Scientific Publishers.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Atomic levels,Cluster models,Cluster surfaces,Co ions,Final state,First principle calculations,Iron pentacarbonyls,Magnetic surfaces,Minimum energy,Ni ions,Reactive gas,Reactive ion,Theoretical study[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Density Functional Theory,First Principle Calculations,Magnetic Surface,Molecular Orbital,Reactive Ions Etching[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1166/jctn.2012.2144[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]