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Growth of zinc oxide sensitive layer on microcantilever surface for gas sensor application
Aprilia L.a, Nuryadi R.a, Mayasari R.D.a, Gustiono D.a, Masmuia, Raharjo J.a, Deni Y.a, Yuliarto B.b, Iqbal M.b, Hartanto D.c
a Center for Materials Technology, Agency for the Assessment and Application of Technology, Puspiptek, Building No. 224, South Tangerang, 15314, Indonesia
b Department of Engineering Physics, Faculty of Industrial Technology, Institut Teknologi Bandung, Bandung, 40132, Indonesia
c Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok, 16424, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]© 2015 IEEE.Microcantilever-based sensors have been demonstrated to be a high sensitive sensor in sensing application areas of chemistry, physics, biology, and biomedical. To determine the sensor selectivity, the microcantilever surface must be coated by a sensitive layer. In this work, zinc oxide (ZnO) is prepared on the microcantilever surface as a sensitive layer by employing a crystal growth method. To confirm the elemental of ZnO sensitive layer, the coated microcantilever surface is characterized by energy dispersive spectroscopy (EDS). Next, we investigate the response of microcantilever sensor to CO2 gas in dynamic mode operation. The results show that the microcantilever sensitively responds the gas, which is indicated by the change of resonance frequency. Moreover, the consistent sensing behavior with certain resonance frequency shift due to gas response over repetitive cycles is found. The quite small of response and recovery times indicate that the sensing performance of the microcantilever with ZnO sensitive layer has high repeatablility and high reproducibility.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Energy dispersive spectroscopies (EDS),Micro cantilever sensors,Piezoresistive microcantilever,Resonance frequencies,Resonance frequency shift,Sensing applications,Sensitive layers,Zinc oxide (ZnO)[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Gas sensor,Piezoresistive Microcantilever,Resonance frequency,Sensitive layer,Zinc Oxide (ZnO)[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1109/QiR.2015.7374916[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]