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Fabrication of ZnO/Au/prism-based surface plasmon resonance device for gas detection

Nuryadi R.a, Mayasari R.D.a, Aprilia L.a, Yuliarto B.b

a Center for Materials Technology, Agency for the Assessment and Application of Technology, Puspiptek, South Tangerang, 15314, Indonesia
b Department of Engineering Physics, Faculty of Industrial Technology, Institut Teknologi Bandung, Bandung, 40132, Indonesia

[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]© 2015 IEEE.Surface plasmon resonance (SPR) sensing devices have attracted interest both from a fundamental physics perspective and as higly sensitive devices for detecting small chemical and biological objects. In this work, we design SPR device using a modified Kretschmann configuration for gas detection. After gold coating on the flat surface of BK-7 semicylindrical prism, ZnO microstructures which work as sensitive layer, are formed on the gold film surface. The light reflectance is measured for various angles in order to observe the SPR spectra. Next, we measure the shift of SPR angle due to response of ZnO sensitive layer to CO2 gas. It is found that the absorption of gas molecules on the sensitive layer produces the shift of SPR spectra to the higher incident angle. The change of the light reflectance due to the gas response on the time-dependent characteristics is also studied.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Chemical and biologicals,Fundamental physics,Gas detection,Kretschmann configuration,shift of SPR angle,Surface plasmon resonance sensing,Time-dependent characteristics,ZnO microstructures[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]gas detection,shift of SPR angle,Surface Plasmon Resonance (SPR),ZnO/Au/prism[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1109/QiR.2015.7374888[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]