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Design and Fabrication of PVA-Based Relative Humidity Sensors Using Thick Film Technology
Martadi S.a, Sulthoni M.A.a, Wiranto G.b, Surawijaya A.a, Herminda I.D.P.b
a School of Electrical Engineering and Informatics, Bandung Institute of Technology, Bandung, Indonesia
b Smart Sensor Research Group, Indonesian Institute of Sciences, Bandung, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]© 2019 IEEE.This paper discusses the design and fabrication of relative humidity sensors with Polyvinyl Alcohol (PVA) as a sensing layer using thick film technology. The design is optimized to produce the ideal geometry according to the limits of thick film technology. The sensor fabrication process uses a screen printing technique on an Alumina (Al2O3) substrate with AgAl as a material for its conductor path. PVA deposition as a sensing layer is done by the spin coating method. Sensor fabrication test results are carried out by varying the 4 humidity points in the chamber with the hygrometer as a reference. Based on the test results it is known that the sensor shows a response to humidity in the form of a resistance value, if the environment around the sensor is more humid, the resistance will decrease. The relatively high value of PVA-based humidity sensor resistance can be reduced by mixing PVA with metal oxide in this study using SnO2.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Poly (vinyl alcohol) (PVA),Resistance values,Screen printing technique,Sensor fabrication,Sensor fabrication process,Sensor resistance,Spin-coating method,Thick film technology[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]PVA,Relative Humidity Sensor,resistance,screen printing,Thick film technology[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1109/ISESD.2019.8909519[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]