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Edge Preserving Filter to Support PSF Estimation of Scanning Electron Microscope Images
Dwika D.A.a, Fauzan M.O.a, Adhika D.R.a, Suprijantoa
a Program Study of Engineering Physics, Faculty of Industrial Technology, Institut Teknologi Bandung, Bandung, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]© 2019 IEEE.Scanning Electron Microscope (SEM) is an instrument that used to observe the surface of an object at a scale of nanometer. However, image degradations caused by blur and noise may be occurred on SEM observation images. Its problems limit the process of observing and quantification problem for subsequent image analysis and visualization. To mitigate problems on blur, an estimation of point spread function (PSF) for specific SEM experiment become challenging, due to noise on a measured image. In the work, an edge preserving filter based on spatial and frequency domains are used for support PSF estimation. The performance of proposed scheme is evaluated for SEM images that acquired using Hitachi SU3500. An object TEM grid is imaged using SEM parameters, i.e. accelerating voltage 30 kV, spot size 10, 20, 30, and 40 with magnification 350 times. The results shown that proposes scheme can be confirmation that estimation PSF has characteristic increasing a radius in x-y plane as proportional with increasing spot size of electron beam.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Accelerating voltages,Edge-preserving filter,Image degradation,PSF estimation,Scanning electrons,SEM observation,Spatial and frequency domain,Spot sizes[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]edge preserving filter,image degradation,point spread function,SEM[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text]This work supported by the research grant from Institut Teknologi Bandung, Indonesia in fiscal year 2019.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1109/ICA.2019.8916721[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]