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Oxidative etching mechanism of the diamond (100) surface
Enriquez J.I.a, Muttaqien F.b, Michiuchi M.c, Inagaki K.a, Geshi M.a, Hamada I.a, Morikawa Y.a
a Department of Precision Engineering, Graduate School of Engineering, Osaka University, Suita, 565-0871, Japan
b Instrumentation and Computational Physics Research Group, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung, 40132, Indonesia
c Advanced Materials Laboratory, Sumitomo Electric Industries, LtdItami, 664-0016, Japan
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]© 2020 The Author(s)We performed density functional theory calculations with van der Waals corrections to elucidate diamond oxidation mechanism on the atomic-level which could lead to insights that will advance the improvement of nascent nanofabrication technologies. We developed a comprehensive theory of oxidative etching of the diamond (100) surface, from the adsorption of gas phase O2, including details of metastable adsorption states, intersystem crossing, and induced surface dereconstruction, to the desorption of CO and CO2, complete etching of the top surface layer and its subsequent stabilization. Oxygen adsorption induce C-dimer bond breaking through the formation of carbonyl structures at low surface coverage. At high surface coverage, adjacent carbonyls can transform into the more stable ether chain with small energy barrier requirement. A mix of carbonyl and ether will form in surfaces with defects, and several models of possible structures have been presented. CO desorption creates a point defect that serves as nucleation site for the preferred etching direction along [011], perpendicular to the top layer C-dimer bonds. We obtained a wide range of desorption activation energies, which depend on the existence of point defects and reconstruction of surfaces. C-dimer formation and oxygen adsorption stabilize vacancies and single-atomic-layer-deep trough.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Carbonyl structure,Inter-system crossings,Metastable adsorption,Oxidation mechanisms,Oxidative etching,Oxygen adsorption,Surface coverages,Van der Waals correction[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Density functional theory,Diamond device fabrication,Diamond etching,Diamond oxidation[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text]This research was partly supported by Sumitomo Electric Industries and Grant-in-Aid for Scientific Research(B) (Grant Nos. 20H02569 ) from the Japan Society for the Promotion of Science . J. I. E. would also like to acknowledge the financial support by the Innovative Asia Program of the Japan International Cooperation Agency (JICA).[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1016/j.carbon.2020.11.057[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]