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Effect of Co-doping on microstructural, crystal structure and optical properties of Ti1-xCOxO2 thin films deposited on Si substrate by MOCVD method
Supriyanto E.a,b, Sutanto H.a,c, Subagio A.a,c, Saragih H.a, Budiman M.a, Arifin P.a, Sukirnoa, Barmawi M.a
a Laboratory for Electronic Material Physics, Department. of Physics, Intitute of Technology Bandung, Indonesia
b Department of Physics, Jember University, Indonesia
c Department of Physics, Diponegoro University, Indonesia
[vc_row][vc_column][vc_row_inner][vc_column_inner][vc_separator css=”.vc_custom_1624529070653{padding-top: 30px !important;padding-bottom: 30px !important;}”][/vc_column_inner][/vc_row_inner][vc_row_inner layout=”boxed”][vc_column_inner width=”3/4″ css=”.vc_custom_1624695412187{border-right-width: 1px !important;border-right-color: #dddddd !important;border-right-style: solid !important;border-radius: 1px !important;}”][vc_empty_space][megatron_heading title=”Abstract” size=”size-sm” text_align=”text-left”][vc_column_text]Ti1-xCOxO2 thin films have been grown on n-type Si(100) substrates by metal organic vapor deposition (MOCVD) using titanium (IV) isopropoxide (TTIP) and tris (2,2,6,6-tetramethyl-3, 5-heptanedionato) cobalt (III) as metal organic precursors. The parameter deposition, such as: bubbler temperature of TTIP Tb(Ti)=50°C; substrate temperature Ts=450°C; bubbler pressure P b(Ti)=260Torr; flow rate of Ar gas through TTIP precursor Ar(Ti)=100sccm (standard cubic centimeters per minute) and flow rate of oxygen gas O2=60sccm were found as optimal deposition parameters. The thin films deposited were have rutile (002) crystal plane, whereas those deposited at other parameter were mixing of anatase and rutile phases. Co dopant with concentration of up to 5.77% was not changes the structure of TiO2. Increase of Co incorporated in thin films was decreasing of band-gap energy. © 2008 American Institute of Physics.[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Author keywords” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Indexed keywords” size=”size-sm” text_align=”text-left”][vc_column_text]Crystalline orientation,MOCVD,Ti02,Ti1.xC0 x02[/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”Funding details” size=”size-sm” text_align=”text-left”][vc_column_text][/vc_column_text][vc_empty_space][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][vc_empty_space][megatron_heading title=”DOI” size=”size-sm” text_align=”text-left”][vc_column_text]https://doi.org/10.1063/1.2906075[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/4″][vc_column_text]Widget Plumx[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_separator css=”.vc_custom_1624528584150{padding-top: 25px !important;padding-bottom: 25px !important;}”][/vc_column][/vc_row]